NOVELLUS

                                      

  IN OEM Ref. No. Part No. Description
27 15-00485-00 14-02005 Bracket, 150mm  
28 15-00700-00 14-02008 Plate, Fork Retainer, Bottom, 200mm  
29 15-00742-00 14-03001 Tube, TC, Ceramic
30 15-10781-00 14-03002 Shaft, Entension  
31 15-10782-00 14-03003 Shaft, Rotation  
32 15-10785-00 14-02005 Coupling, Extension Shaft  
33 15-11149-00 14-02007 Plate, Rotation Indexer  
34 15-032777-00 14-02008 Exclusion Ring, 200mm, 2.0mm
35 15-055721-00 14-02009 Bushing, Split  
36 16-00092-00 14-02010 Wire, Insulated, Ceramic Bead, Short  
37 16-00098-00 14-02011 Wire, Insulated, Ceramic Bead, Long
38 19-00056-00 14-02012 Assy, Feedthrugh  
39 19-00266-01 14-02013 Motor, Extension, C1
40 19-00267-01 14-02014 Motor, Rotation, C1
41 19-00268-01 14-02015 Motor, Lift, C1
42 19-00331-00 14-02016 PCB, RS-232, C1  
43 19-034573-04 14-02017 Bearing, Linear/Rotary 1" WTM  
44 20-00153-00 14-02018 Ball  Heater Support  2"  Ceramic  
45 22-10369-00 14-02019 Indexer Rotate Cylinder  
46 27-00010-01 14-02020 Thermocouple  Type J  1/8"  
47 27-00062-00 14-02021 Guage, Vacuum Pressure, TC  
48 27-00127-00 14-02022 Thermocouple  Type E  LG  
49 27-10052-00 14-02024 Power Supply, 5@7, 12@2, -12@1  
50 27-10157-00 14-02025 I/O Controller, 10MHz High Speed


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Mattron supplies common electrical and mechanical components for semiconductor equipment.

Please email us at sales@mattron.com to check the availability of parts listed above.