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| IN | OEM Part No. | Part No. | Description | |
| 1 | 00-678317-01 | GB201 | Pickup, Wafer | |
| 2 | 02-00194-00 | CB103 | Assy, TEOS Liquid End |
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| 3 | 02-10472-00 | WH001 | Indexer Assembly, Left |
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| 4 | 02-10472-01 | WH002 | Indexer Assembly, Right |
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| 5 | 02-028052-00 | CC101 | Assy, PCB, Interlock, CVD-D | |
| 6 | 02-041994-00 | CB104 | PCB, Hoist Actuator |
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| 7 | 02-057946-00 | CB105 | Interlock Assy, SIOC 0 and 1 | |
| 8 | 02-106507-00 | CC131 | Spindle Assy, Ferrofluidic, SEQUEL | |
| 9 | 02-130206-00 | CB107 | Assy, L-Type Insert, 46X236 |
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| 10 | 02-295973-00 | GB108 | Assy, I/O Junction, Gamma 2130 |
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| 11 | 02-295974-00 | GB109 | Assy, I/O Junction, Gamma 2130 |
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| 12 | 03-00053-00 | MB205 | Assy, Cable | |
| 13 | 03-00288-04 | CD001 | Cable Assy,CA57 (84FT) | |
| 14 | 03-10641-00 | WH001 | Drive Assy, Left Indexer |
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| 15 | 03-10641-01 | WH002 | Drive Assy, Right Indexer |
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| 16 | 03-10748-00 | CC102 | PCB PCA CVD-W Interlock | |
| 17 | 03-032706-00 | CC107 | PCA, DLCM Interlock |
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| 18 | 03-042608-00 | CB113 | Assy,Harness,Ped Up/Dn SPD-S |
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| 19 | 03-123072-00 | CC104 | PCB Interlock Assy, SEQUEL X | |
| 20 | 03-134345-00 | IB207 | Cable Assy, SIOC, Jumper, PVD 300 | |
| 21 | 03-134710-00 | CC105 | PCA, ILDS Interlock, SEQUEL-X | |
| 22 | 03-169460-00 | GB115 | Interlock, Gamma 2130 | |
| 23 | 03-170824-00 | GB116 | PCB, I/O Junction, Gamma 2130 |
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| 24 | 03-258416-00 | CC106 | PCA, Interlock, 7/8 Chan Gasbox | |
| 25 | 04-708072-01 | MB206 | Clamp, Center Bellows | |
| 26 | 05-00022-00 | CB117 | PM Kit, TEOS | |
| 27 | 10-116652-01 | GG103 | Assy,Tube,H-Piece,3/8 | |
| 28 | 10-157172-00 | IB203 | Tube Assy, H2O Manf, PVD 300 | |
| 29 | 11-100257-13 | GG104 | Assy,3/8 Hose,3/8F-3/8F,AN,H20 | |
| 30 | 15-00343-00 | CB118 | Guard, EMO Switch |
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| 31 | 15-00699-01 | CB119 | Finger, Fork, 150mm |
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| 32 | 15-033743-00 | CB123 | Link, Upper, ECL |
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| 33 | 15-034972-00 | CB124 | Adaptor, Theta |
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| 34 | 15-050160-41 | CB122 | Tube, Injector, Hi-Purity, 4.13 in. |
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| 35 | 15-051711-15 | CB126 | Tube, Injector, Std. Purity |
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| 36 | 15-106582-00 | IB206 | Shoulder Bushing | |
| 37 | 15-127648-00 | IB202 | Block, Grounding, 500 A | |
| 38 | 15-128755-00 | GG105 | Clamp, Seal Plate | |
| 39 | 15-167885-00 | CB201 | Plug, Cool Pedestal Ctrg, Loadlock, VECTOR | |
| 40 | 17-109702-03 | CB202 | Bracket, SPD |
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| 41 | 19-00033-00 | CC124 | Spur Gear | |
| 42 | 19-00273-00 | CC125 | Washer, Ni | |
| 43 | 19-00358-00 | CC126 | Cartridge, Calibrated 100PSI | |
| 44 | 19-033267-00 | CC127 | Bellows, Lift Pin | |
| 45 | 19-034573-15 | CC128 | Bearing, RadialL7/8 ODx 5/8 ID | |
| 46 | 22-10018-00 | CB129 | O-Ring, 15.955 x 0.210, Face Plate |
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| 47 | 22-10068-00 | CB130 | O-Ring, 13.975 x 0.210, Viton |
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| 48 | 22-10304-00 | CB131 | O-Ring TM Robot 0.210 x 10.50ID |
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| 49 | 22-10379-00 | CB132 | O-Ring, 6.225 x 0.210, Window |
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| 50 | 22-10390-00 | CB133 | O-Ring 0.210 x 10.50 ID, Viton |
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| 51 | 27-112782-00 | WS001 | Detector, EP Dual | |
| 52 | 27-119976-00 | CC129 | Gauge, Photohelic, 0-0.5" | |
| 53 | 27-179917-00 | IB201 | Valve, INOVA-xT | |
| 54 | 27-402855-00 | CB135 | O-ring, 263, Silicone |
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| 55 | 32-100999-01 | CB136 | EPROM, 3.14 Anafaze CLS208 |
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| 56 | 34-048433-00 | CB137 | Button, EMO, ISO |
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| 57 | 34-154064-00 | CB138 | Heater, HIM,120V,18W,VCTR |
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| 58 | 36-112925-00 | IB204 | Fuse, 12A, 600V, 12T | |
| 59 | 39-100793-00 | MB202 | Conn, 5P CPC, Female, Metal | |
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Mattron also supplies common industrial parts consumable and non-consumable. Please email us at sales@mattron.com to check the availability of parts not listed above. |
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