IN OEM Part No. Part No. Description
1 00-678317-01 GB201 Pickup, Wafer  
2 02-00194-00 CB103 Assy, TEOS Liquid End
3 02-028052-00 CC101 Assy, PCB, Interlock, CVD-D  
4 02-041994-00 CB104 PCB, Hoist Actuator
5 02-057946-00 CB105 Interlock Assy, SIOC 0 and 1  
6 02-106507-00 CC131 Spindle Assy, Ferrofluidic, SEQUEL  
7 02-126640-00 IL101 Assy, Temp Vac, Dual Photo, SEQ-X  
8 02-130206-00 CB107 Assy, L-Type Insert, 46X236
9 02-133618-00 IL102 Assy, Elec, ISSLDS, VAP, LIQ  
10 02-133620-00 IL103 Assy, ISSLDS, VAP, LIQ  
11 02-148507-00 IL104 Leak Detector Assy  
12 02-151773-00 IL105 Assy, Mech, ILDS, VAP, LIQ  
13 02-261839-00 IL106 Gas Sys Assy,Degas, ILDS  
14 02-295973-00 GB108 Assy, I/O Junction, Gamma 2130
15 02-295974-00 GB109 Assy, I/O Junction, Gamma 2130
16 03-00053-00 MB205 Assy, Cable  
17 03-00074-00 CB110 Assy, Cassette Door Sensor Harness  
18 03-10641-00 WH001 Drive Assy, Left Indexer
19 03-10641-01 WH002 Drive Assy, Right Indexer
20 03-10748-00 CC102 PCB PCA CVD-W Interlock  
21 03-042608-00 CB113 Assy,Harness,Ped Up/Dn SPD-S
22 03-122190-00 CC103 Assy, Heater Isolation Board  
23 03-123072-00 CC104 PCB Interlock Assy, SEQUEL X  
24 03-134345-00 IB207 Cable Assy, SIOC, Jumper, PVD 300  
25 03-134710-00 CC105 PCA, ILDS Interlock, SEQUEL-X  
26 03-138114-00 IL107 Assy, RF Filter Box, ILDS, Retro  
27 03-169460-00 GB115 Interlock, Gamma 2130  
28 03-170824-00 GB116 PCB, I/O Junction, Gamma 2130
29 03-258416-00 CC106 PCA, Interlock, 7/8 Chan Gasbox  
30 04-126474-00 IL108 Kit, Mounting, Spill Sensor, Doped  
31 04-128750-00 GG101 Kit, Sealplate Upgrd for DS1-IC  
32 04-134652-00 IL109 Kit,Heater,Inj Man,ILDS,SEQ-X  
33 04-134653-00 IL110 Kit,Heater,Mix Bowl,ILDS,SEQ-X  
34 04-708072-01 MB206 Clamp, Center Bellows  
35 05-00022-00 CB117 PM Kit, TEOS  
36 05-131127-00 GG102 Kit, Sealplate Upgrd for DS1-IC  
37 05-134285-00 IL111 Kit, Retro, ISSLDS, VAP, LIQ, SEQ-X  
38 10-116652-01 GG103 Assy,Tube,H-Piece,3/8  
39 10-157172-00 IB203 Tube Assy, H2O Manf, PVD 300  
40 11-100257-13 GG104 Assy,3/8 Hose,3/8F-3/8F,AN,H20  
41 15-00343-00 CB118 Guard, EMO Switch
42 15-00699-01 CB119 Finger, Fork, 150mm
43 15-033743-00 CB123 Link, Upper, ECL
44 15-034972-00 CB124 Adaptor, Theta
45 15-050160-41 CB122 Tube, Injector, Hi-Purity, 4.13 in.
46 15-051711-15 CB126 Tube, Injector, Std. Purity
47 15-106582-00 IB206 Shoulder Bushing  
48 15-127648-00 IB202 Block, Grounding, 500 A  
49 15-128755-00 GG105 Clamp, Seal Plate  
50 15-167885-00 CB201 Plug, Cool Pedestal Ctrg, Loadlock, VECTOR  
51 16-119900-02 GG106 Seal Plate,3/8 Tubing  
52 17-109702-03 CB202 Bracket, SPD
53 19-00033-00 CC124 Spur Gear  
54 19-00273-00 CC125 Washer, Ni  
55 19-00358-00 CC126 Cartridge, Calibrated 100PSI  
56 19-033267-00 CC127 Bellows, Lift Pin  
57 19-034573-15 CC128 Bearing, RadialL7/8 ODx 5/8 ID  
58 20-123267-00 CB128 Gate, L-Type, 46X236, SMC
59 22-10018-00 CB129 O-Ring, 15.955 x 0.210, Face Plate
60 22-10068-00 CB130 O-Ring, 13.975 x 0.210, Viton
61 22-10304-00 CB131 O-Ring TM Robot 0.210 x 10.50ID
62 22-10379-00 CB132 O-Ring, 6.225 x 0.210, Window
63 22-10390-00 CB133 O-Ring 0.210 x 10.50 ID, Viton
64 27-119976-00 CC129 Gauge, Photohelic, 0-0.5"  
65 27-179917-00 IB201 Valve, INOVA-xT  
66 27-402855-00 CB135 O-ring, 263, Silicone
67 32-100999-01 CB136 EPROM, 3.14 Anafaze CLS208
68 34-048433-00 CB137 Button, EMO, ISO
69 34-154064-00 CB138 Heater, HIM,120V,18W,VCTR
70 36-112925-00 IB204 Fuse, 12A, 600V, 12T  
71 39-100793-00 MB202 Conn, 5P CPC, Female, Metal  

Mattron also supplies common industrial parts consumable and non-consumable.

Please email us at sales@mattron.com to check the availability of parts not listed above.