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| IN | OEM Part No. | Part No. | Description | ||||
| 1 | 02-00194-00 | CB103 | Assy, TEOS Liquid End |
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| 2 | 02-041994-00 | CB104 | PCB, Hoist Actuator |
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| 3 | 02-130206-00 | CB107 | Assy, L-Type Insert, 46X236 |
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| 4 | 03-10748-00 | CC102 | PCB PCA CVD-W Interlock | ||||
| 5 | 03-032706-00 | CC107 | PCA, DLCM Interlock |
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| 6 | 03-042608-00 | CB113 | Assy,Harness,Ped Up/Dn SPD-S |
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| 7 | 03-123072-00 | CC104 | PCB Interlock Assy, SEQUEL X | ||||
| 8 | 03-263834-00 | CC105 | RF Gen Interface, C3 SPD | ||||
| 9 | 10-143628-00 | CB114 | Tube, ILDS Liq Delivery | ||||
| 10 | 15-00699-01 | CB115 | Finger, Fork, 150mm |
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| 11 | 15-01122-00 | CB116 | Bracket, Paddle, 200mm | ||||
| 12 | 15-028766-00 | CB118 | Ring, Guard, 200 mm | ||||
| 13 | 15-032502-00 | CB119 | Pin, Wafer Lift | ||||
| 14 | 15-050160-15 | CB120 | Tube, Injector, Hi-Purity, 1.5" | ||||
| 15 | 15-050160-20 | CB121 | Tube, Injector, Hi-Purity, 2.0" | ||||
| 16 | 15-050160-41 | CB122 | Tube, Injector, Hi-Purity, 4.13 in. |
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| 17 | 15-051711-15 | CB126 | Tube, Injector, Std. Purity |
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| 18 | 15-051711-25 | CB127 | Tube, Injector, Std. Purity | ||||
| 19 | 15-107698-00 | CB128 | Cap, Ceramic, Feedthru | ||||
| 20 | 15-120150-03 | CB130 | Tube, Injector, 0.50, Hi Purity | ||||
| 21 | 15-158185-00 | CB131 | Injector, Tube, Clean, HDP, Hi-Purity | ||||
| 22 | 19-00033-00 | CC124 | Spur Gear | ||||
| 23 | 19-00273-00 | CC125 | Washer, Ni | ||||
| 24 | 19-00307-00 | CC126 | Bellows, Lift Pin | ||||
| 25 | 19-00358-00 | CC127 | Cartridge, Calibrated 100PSI | ||||
| 26 | 19-033267-00 | CC128 | Bellows, Lift Pin | ||||
| 27 | 19-034573-15 | CC129 | Bearing, RadialL7/8 ODx 5/8 ID | ||||
| 28 | 27-034079-00 | CC132 | Power Supply, ESC |
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| 29 | 34-00196-00 | CC134 | Thermocouple, Type J |
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| 30 | 34-158774-00 | CC135 | Switch, 740 Torr, ATM | ||||
| 31 | 60-00193-00 | CC136 | Switch, Pressure, ATM | ||||
| 32 | 60-00195-00 | CC137 | Switch, Vacuum, 100 Torr | ||||
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Mattron supplies common electrical and mechanical components for semiconductor equipment. Please email us at sales@mattron.com to check the availability of parts listed above. |
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