IN OEM Part No. Part No. Description
1 715-011623-101 LV001 Lifter, Wafer, 4 Pin, Flexible
2 715-026183-001 LV002 Electrode, Upper, Aluminum
3 715-250597-001 LV003 Clamp, Upper
4 715-250500-001 LV004 Diffuser, Upper, Electrode
5 716-005125-001 LV005 Window, Quartz, Rear
6 716-006712-001 LV006 Electrode, Quick Change, Graphite
7 716-011010-001 LV007 Window, Quartz
8 716-011564-162 LV008 Clamp, Domed Ceramic, 6"
9 716-011570-002 LV009 Filler, Orifice, w/c Ceramic
10 716-011574-001 LV010 Plunger, Ceramic
11 716-011574-004 LV011 Plunger, Ceramic
12 716-011760-016 LV012 Ring, Mounting, Ceramic
13 716-011924-001 LV013 Ring, Plunger, Ceramic
14 716-028124-002 LV014 Ring, Filler, Ceramic
15 716-028415-015 LV015 Ring, Focus, Ceramic
16 716-028455-012 LV016 Window, Quartz, TCP Top
17 716-029436-006 LV017 Ring, Electrode, Ceramic
18 716-030137-001 LV018 Ring, Edge, 8"
19 716-030138-001 LV019 Ring, Edge, ESC, 6"
20 716-249041-001 LV021 Ring, Quartz, Undercut, Lip, Split
21 716-249041-002 LV022 Ring, Quartz, Lip, Split
22 716-330046-004 LV023 Ring, Focus, 8"
23 716-330046-261 LV024 Ring, Edge, ESC 6"
24 716-330062-006 LV025 Ring, Baffle, Ceramic
25 716-330356-002 LV026 Window, Endpoint, Quartz
26 716-443087-301 LV027 Ring, H Edge H Wall, 8"
27 716-443091-002 LV028 Ring, Quartz
28 853-011632-001 LM029 Lower Electrode Assembly

Please email us at sales@mattron.com to check the availability of parts not listed above.